Location History:
- Mitaka, JP (2002 - 2003)
- Tokyo, JP (2012)
Company Filing History:
Years Active: 2002-2012
Title: Shigeharu Arisa: Innovator in Wafer Processing Technologies
Introduction
Shigeharu Arisa is a notable inventor based in Mitaka, Japan. He has made significant contributions to the field of wafer processing, holding a total of 3 patents. His innovative work focuses on improving the efficiency and precision of wafer grinding and etching processes.
Latest Patents
Arisa's latest patents include a wafer grinding method and a wafer grinding machine. This invention allows for the grinding of a wafer by executing both the rough grinding process and the finish grinding process. After the rough grinding process, the wafer thickness is measured using a noncontact-type thickness gauge. During the finish grinding process, the finish thickness is finely adjusted by utilizing a contact-type thickness gauge, referring to the measurement data from the noncontact-type thickness gauge. Another significant patent is for an etching apparatus. In this invention, a wafer is supplied from a wafer cassette to an etching part by a wafer transport robot. After the etching process, a wafer frame is supplied from a wafer frame supply part to a mount part, which then moves to the upper part of a processing vessel of the etching part to mount the wafer.
Career Highlights
Shigeharu Arisa is currently employed at Tokyo Seimitsu Co., Ltd., where he continues to develop innovative technologies in wafer processing. His work has been instrumental in advancing the capabilities of wafer manufacturing.
Collaborations
Arisa collaborates with Toshiyuki Ozawa, contributing to the development of cutting-edge technologies in their field.
Conclusion
Shigeharu Arisa's contributions to wafer processing technologies highlight his role as an influential inventor. His patents reflect a commitment to innovation and precision in the semiconductor industry.