The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2003
Filed:
Aug. 18, 2000
Applicant:
Inventor:
Shigeharu Arisa, Mitaka, JP;
Assignee:
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 ;
U.S. Cl.
CPC ...
C23F 1/00 ;
Abstract
A wafer is supplied from a wafer cassette to an etching part by a wafer transport robot so as to be etched. After the etching process, a wafer frame is supplied from a wafer frame supply part to a mount part. The mount part to which the wafer frame is supplied moves to the upper part of a processing vessel of the etching part, and mounts the wafer at that position. After that, the mount part returns to its original position. A wafer frame collecting robot collects the wafer frame from the mount part that has returned to its original position, and stores the wafer frame in the wafer frame cassette.