Location History:
- Taoyuan Hsien, TW (2016)
- Aurora, IL (US) (2017)
Company Filing History:
Years Active: 2016-2017
Title: Innovations by Sheng-Huan Liu in Polishing Technology
Introduction
Sheng-Huan Liu is a notable inventor based in Aurora, IL, who has made significant contributions to the field of polishing technology. With a total of 2 patents, Liu has developed innovative solutions that enhance the efficiency and effectiveness of chemically-mechanical polishing processes.
Latest Patents
Liu's latest patents include a "Polishing pad with offset concentric grooving pattern and method for polishing a substrate therewith." This invention provides a polishing pad designed for chemically-mechanically polishing a substrate. The polishing pad features a plurality of grooves, including at least a first plurality of concentric grooves with a distinct center of concentricity, and a second plurality of concentric grooves with a different center of concentricity. Notably, the first and second centers of concentricity do not coincide, and the axis of rotation of the polishing pad is not aligned with either center. Additionally, the grooves do not form a continuous spiral pattern, and the polishing surface avoids a mosaic groove pattern.
Another significant patent is the "CMP polishing pad having edge exclusion region of offset concentric groove pattern." This invention also focuses on a polishing pad and its method of use for chemically-mechanically polishing a substrate. It comprises a grooved region and an exclusion region, which is located adjacent to the circumference of the polishing pad and is devoid of grooves.
Career Highlights
Sheng-Huan Liu is currently employed at Cabot Microelectronics Corporation, where he continues to innovate in the field of polishing technology. His work has been instrumental in advancing the capabilities of polishing pads used in various applications.
Collaborations
Liu has collaborated with notable colleagues, including Ching-Ming Tsai and Shi-Wei Cheng, contributing to the development of advanced polishing technologies.
Conclusion
Sheng-Huan Liu's contributions to polishing technology through his innovative patents demonstrate his expertise and commitment to enhancing the efficiency of substrate polishing processes. His work at Cabot Microelectronics Corporation continues to influence the industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.