Company Filing History:
2 out of 233 
1 out of 4 
1 out of 1 Years Active: 2008-2017
Title: Innovations of Sheng-Hsiang Tseng
Introduction
Sheng-Hsiang Tseng is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of MEMS (Micro-Electro-Mechanical Systems) technology, holding a total of four patents. His work focuses on enhancing the performance and production efficiency of MEMS devices.
Latest Patents
One of his latest patents is the "Monolithic z-axis torsional CMOS MEMS accelerometer." This invention discloses a monolithic z-axis torsional CMOS MEMS accelerometer that includes a matching frame, two anchors, a first comb structure, a second comb structure, and a proof mass. The implementation of this invention improves the capacitance sensitivity of Z+ direction and Z− direction sensing signals by the accelerometer. Additionally, the feasibility of applying micromachining etch processes from the top side promotes both the ease and yield of production.
Another significant patent is the "CMOS-MEMS switch structure." This structure includes a first substrate, a second substrate, a first cantilever beam, and a second cantilever beam. The first and second substrates are positioned opposite each other, with the cantilever beams extending toward one another. This design allows for the connection and disconnection of the beams, effectively opening and closing the CMOS-MEMS switch structure.
Career Highlights
Sheng-Hsiang Tseng has worked with prominent organizations such as the National Applied Research Laboratories and the National Chip Implementation Center. His experience in these institutions has contributed to his expertise in MEMS technology and innovation.
Collaborations
He has collaborated with notable coworkers, including Ying-Zong Juang and Chin-Fong Chiu, further enhancing his contributions to the field.
Conclusion
Sheng-Hsiang Tseng's innovative work in MEMS technology, particularly through his patents, showcases his significant impact on the industry. His inventions continue to advance the capabilities and production of MEMS devices, marking him as a key figure in this technological domain.