The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Jun. 15, 2011
You-liang Lai, Hsinchu, TW;
Ying-zong Juang, Hsinchu, TW;
Hann-huei Tsai, Hsinchu, TW;
Sheng-hsiang Tseng, Hsinchu, TW;
Chin-fong Chiu, Hsinchu, TW;
You-Liang Lai, Hsinchu, TW;
Ying-Zong Juang, Hsinchu, TW;
Hann-Huei Tsai, Hsinchu, TW;
Sheng-Hsiang Tseng, Hsinchu, TW;
Chin-Fong Chiu, Hsinchu, TW;
National Chip Implementation Center, Hsinchu, TW;
National Applied Research Laboratories, Hsinchu, TW;
Abstract
A CMOS-MEMS switch structure is disclosed. The CMOS-MEMS switch structure includes a first substrate, a second substrate, a first cantilever beam, and a second cantilever beam. The first and second substrates are positioned opposite each other. The first cantilever beam is provided on the first substrate, extends from the first substrate toward the second substrate, and bends downward. Likewise, the second cantilever beam is provided on the second substrate, extends from the second substrate toward the first substrate, and bends downward. The first and second substrates are movable toward each other to connect a first top surface of the first cantilever beam and a second top surface of the second cantilever beam, and away from each other so that the first top surface of the first cantilever beam and the second top surface of the second cantilever beam are disconnected, thereby closing or opening the CMOS-MEMS switch structure.