The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Feb. 19, 2010
Chin-fong Chiu, Hsinchu, TW;
Ying Zong Juang, Hsinchu, TW;
Hann Huei Tsai, Hsinchu, TW;
Sheng-hsiang Tseng, Hsinchu, TW;
Chen-fu Lin, Hsinchu, TW;
Chin-Fong Chiu, Hsinchu, TW;
Ying Zong Juang, Hsinchu, TW;
Hann Huei Tsai, Hsinchu, TW;
Sheng-Hsiang Tseng, Hsinchu, TW;
Chen-Fu Lin, Hsinchu, TW;
Abstract
The present invention discloses a CMOS-MEMS cantilever structure. The CMOS-MEMS cantilever structure includes a substrate, a circuit structure, and a cantilever beam. The substrate has a circuit area and a sensor unit area defined thereon. The circuit structure is formed in the circuit area. The cantilever beam is disposed in the sensor unit area with one end floating above the substrate and the other end connecting to the circuit structure. With the above arrangement, the manufacturing process of CMOS-MEMS cantilever structure of this invention can be simplified. Furthermore, the structure of the cantilever beam is thinned down and therefore has a higher sensitivity.