Shan Tang

Title: Inventor Spotlight: Shan Tang

Introduction

Shan Tang, an innovative inventor based in Middleton, MA, has made significant contributions to the field of semiconductor technology. With a focus on developing techniques to enhance the processing of low dielectric constant films, his work addresses critical challenges in modern electronics.

Latest Patents

Shan Tang holds a patent for "Techniques for improved low dielectric constant film processing." This remarkable method involves several steps, including providing a substrate with a low dielectric constant layer on its surface. The process involves heating the substrate to a temperature between 200°C and 550°C and conducting an ion implant treatment while maintaining that temperature. This treatment consists of implanting low-weight ion species at an energy that generates an implant depth varying from 40% to 175% of the layer thickness. Such advancements are essential in refining materials used in electronic components.

Career Highlights

Shan Tang currently works at Applied Materials, Inc., a leader in materials engineering solutions. His expertise and innovations contribute significantly to the company's mission of providing the essential equipment and services for semiconductor manufacturing.

Collaborations

Throughout his career, Shan has collaborated with talented individuals such as Rajesh Prasad and Martin Jay Seamons. These partnerships are crucial in advancing their shared goal of pushing the boundaries of technology and innovation in the semiconductor industry.

Conclusion

Shan Tang's inventive contributions and commitment to enhancing low dielectric constant film processing demonstrate his pivotal role in modernizing electronics. His achievements highlight the significant impact that individual inventors and their collaborations can have on technology, paving the way for the future of semiconductor applications.