Location History:
- Cheonan-si, KR (2022)
- Chungcheongnam-do, KR (2020 - 2023)
Company Filing History:
Years Active: 2020-2023
Title: SeungJu Chun: Innovator in Substrate Processing Technologies
Introduction
SeungJu Chun is a prominent inventor based in Chungcheongnam-do, South Korea. He has made significant contributions to the field of substrate processing, holding a total of four patents. His innovative work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of SeungJu Chun's latest patents is a method for forming a silicon nitride film selectively on top and bottom portions. This method involves fabricating a layer structure in a trench by simultaneously forming a dielectric film containing a Si–N bond on the upper surface, bottom surface, and sidewalls of the trench. The top and bottom portions of the film are given different chemical resistance properties through plasma bombardment, allowing for selective removal of the sidewall portion by wet etching. Another notable patent is a substrate processing system designed to improve productivity. This system includes a first chamber for accommodating substrates, a second chamber for transferring substrates, and a temperature control unit to adjust the gas temperature in the second chamber.
Career Highlights
SeungJu Chun is currently employed at ASML Holding B.V., a leading company in the semiconductor industry. His work at ASML has positioned him as a key player in advancing substrate processing technologies. His innovative approaches have contributed to the development of more efficient manufacturing processes.
Collaborations
SeungJu Chun has collaborated with notable colleagues, including YoonKi Min and Dai Ishikawa. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
SeungJu Chun's contributions to substrate processing technologies have made a significant impact in the semiconductor industry. His innovative patents and collaborative efforts highlight his dedication to advancing manufacturing processes. His work continues to influence the field and drive technological advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.