The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Jun. 18, 2019
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
YoonKi Min, Seoul, KR;
YoungHoon Kim, Cheonan-si, KR;
HakJoo Lee, Pyeongtaek-si, KR;
SeungJu Chun, Cheonan-si, KR;
Assignee:
ASM IP Holding B.V., Versterkerstraat, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/46 (2006.01); H01L 21/677 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/46 (2013.01); C23C 16/52 (2013.01); H01L 21/67248 (2013.01); H01L 21/67703 (2013.01);
Abstract
Provided is a substrate processing system for improving productivity of processes. In this regard, the substrate processing system includes: a first chamber providing a space where at least one substrate is accommodated; a second chamber configured to transfer at least one substrate to the first chamber; and a temperature control unit configured to change a temperature of a gas in the second chamber.