Company Filing History:
Years Active: 2019-2025
Title: Seung Youb Sa: Innovator in Substrate Processing Technology
Introduction
Seung Youb Sa is a prominent inventor based in Bucheon-si, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His innovative work focuses on enhancing the efficiency and reliability of substrate processing apparatuses.
Latest Patents
Among his latest patents, Seung Youb Sa has developed a substrate processing apparatus that features a chamber with a sidewall and a susceptor for mounting a substrate. This apparatus includes an upper dome made of a transparent dielectric material, which covers the chamber's upper surface. An antenna is integrated into the upper dome to generate inductively coupled plasma. The design incorporates two one-turn unit antennas that overlap each other, ensuring effective plasma generation while maintaining structural integrity. Another notable patent addresses the positioning of first and second electrodes within the substrate processing apparatus. This design considers differences in coefficients of thermal expansion, preventing short circuits during thermal expansion and maintaining uniformity in thin film processing.
Career Highlights
Seung Youb Sa is currently associated with Jusung Engineering Co., Ltd., a company known for its advancements in semiconductor manufacturing equipment. His work has significantly impacted the efficiency of substrate processing technologies, making him a valuable asset in the industry.
Collaborations
Seung Youb Sa has collaborated with notable colleagues, including Ki Bum Kim and Ho Boem Her, contributing to various innovative projects within the field.
Conclusion
Seung Youb Sa's contributions to substrate processing technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in substrate processing, positioning him as a key figure in the industry.