The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Jan. 31, 2019
Jusung Engineering Co., Ltd., Gwangju-si, Gyeonggi-do, KR;
Ki Bum Kim, Gwangju-si, KR;
Seung Youb Sa, Bucheon-si, KR;
Ram Woo, Gwangju-si, KR;
Myung Jin Lee, Gunpo-si, KR;
Seung Dae Choi, Yongin-si, KR;
Jong Sung Choi, Anyang-si, KR;
Ho Boem Her, Incheon, KR;
JUSUNG ENGINEERING CO., LTD., , KR;
Abstract
An embodiment of a substrate treatment device may comprise: a disk provided to be able to rotate; at least one susceptor arranged on the disk, a substrate being seated on the upper surface of the susceptor, the susceptor rotating, as the disk rotates, and revolving about the center of the disk as the axis; a metal ring coupled to the lower portion of the susceptor and arranged such that the center of the metal ring coincides with the center of the susceptor, and a magnet arranged radially on the lower portion of the disk with reference to the center of the disk and provided such that at least a part of the magnet faces the metal ring in the up/down direction.