Company Filing History:
Years Active: 2019-2025
Title: Ho Boem Her: Innovator in Substrate Processing Technology
Introduction
Ho Boem Her is a prominent inventor based in Incheon, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 3 patents. His innovative work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.
Latest Patents
One of his latest patents is a substrate processing apparatus that includes a chamber with a sidewall and a susceptor for mounting a substrate inside the chamber. This apparatus features an upper dome made of a transparent dielectric material, along with an antenna designed to generate inductively coupled plasma. The antenna consists of two one-turn unit antennas that overlap each other and are connected in parallel to a radio-frequency (RF) power supply. Each one-turn unit antenna stands upright vertically, optimizing the plasma generation process.
Another notable patent is for a substrate treatment device that comprises a rotating disk and at least one susceptor arranged on the disk. The susceptor rotates with the disk, allowing a substrate to be seated on its upper surface. Additionally, a metal ring is coupled to the lower portion of the susceptor, aligning with its center, while a magnet is positioned radially on the disk to enhance the treatment process.
Career Highlights
Ho Boem Her is currently employed at Jusung Engineering Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has significantly impacted the industry, leading to advancements in manufacturing processes.
Collaborations
Throughout his career, Ho Boem Her has collaborated with notable colleagues, including Seung Youb Sa and Ki Bum Kim. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Ho Boem Her is a distinguished inventor whose work in substrate processing technology has led to multiple patents and advancements in the field. His contributions continue to shape the future of substrate processing, making him a key figure in the industry.