The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2019
Filed:
May. 10, 2016
Jusung Engineering Co., Ltd., Gwangju-si, Gyeonggi-do, KR;
Ki Bum Kim, Gwangju-si, KR;
Seung Youb Sa, Bucheon-si, KR;
Ram Woo, Gwangju-si, KR;
Myung Jin Lee, Gunpo-si, KR;
Seung Dae Choi, Yongin-si, KR;
Jong Sung Choi, Anyang-si, KR;
Ho Boem Her, Incheon, KR;
JUSUNG ENGINEERING CO., LTD., , KR;
Abstract
Disclosed is a substrate processing apparatus including a disc provided so as to be rotatable on its axis, at least one susceptor disposed on the disc such that a substrate is seated on an upper surface thereof, the susceptor being configured to rotate on its axis and to revolve around a center of the disc as the disc rotates on its axis, a metal ring coupled to a lower portion of the susceptor, the metal ring being arranged such that a center thereof coincides with a center of the susceptor, and a magnet provided below the disc so as to be radially arranged on a basis of the center of the disc, at least a portion of the magnet being opposite the metal ring in a vertical direction.