Company Filing History:
Years Active: 2006-2013
Title: The Innovations of Sergei Drizlikh
Introduction
Sergei Drizlikh is a notable inventor based in Scarborough, ME (US). He has made significant contributions to the field of semiconductor technology, holding a total of 9 patents. His work focuses on improving processes that are critical to the manufacturing of integrated circuits.
Latest Patents
One of Drizlikh's latest patents is titled "System and method for monitoring chloride content and concentration induced by a metal etch process." This invention discloses a method for monitoring chloride levels during a metal etch process on semiconductor wafers. The process involves depositing a blank metal film on a wafer, applying a metal etch process, and then scanning the wafer to generate a chlorine concentration map. This map provides valuable information to prevent metal chloride corrosion on semiconductor wafers.
Another significant patent is the "Method and apparatus for reducing plasma process induced damage in integrated circuits." This invention addresses the issue of plasma process induced damage (PPID) that can occur during dielectric deposition. By interposing an insulating material between conductive materials, Drizlikh's method reduces electric charge accumulation, thereby minimizing damage during the plasma process.
Career Highlights
Drizlikh is currently employed at National Semiconductor Corporation, where he continues to innovate in the semiconductor industry. His work has been instrumental in enhancing the reliability and efficiency of integrated circuits.
Collaborations
Throughout his career, Drizlikh has collaborated with notable colleagues, including Thomas Francis and Todd Patrick Thibeault. These collaborations have contributed to the advancement of technology in their field.
Conclusion
Sergei Drizlikh's contributions to semiconductor technology through his patents and innovations have made a significant impact on the industry. His work continues to influence the development of more efficient and reliable integrated circuits.