SeongRyeong Kim

Title: SeongRyeong Kim: Innovator in Semiconductor Technology

Introduction

SeongRyeong Kim is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on innovative methods for enhancing the quality and efficiency of semiconductor manufacturing processes.

Latest Patents

One of SeongRyeong Kim's latest patents is a method for filling a gap in a three-dimensional structure on a semiconductor substrate. This application relates to a method of filling a gap in a three-dimensional structure over a semiconductor substrate. The method includes depositing a thin film at least on a three-dimensional structure over a substrate using at least one reaction gas activated with a first radio frequency (RF) power having a first frequency. The three-dimensional structure comprises a trench and/or hole. The method also includes etching the deposited thin film using at least one etchant activated with a second RF power having a second frequency lower than the first frequency. This process may be repeated until the trench and/or hole are filled with the thin film, resulting in a thin film that is substantially free of voids and/or seams.

Another significant patent is a cyclical deposition method including a treatment step and apparatus for the same. This method and apparatus are designed for depositing a material on a surface of a substrate. The method includes a treatment step to suppress the rate of material deposition on the surface of the substrate, which can lead to higher-quality deposited material. Additionally, this method can be used to fill a recess within the surface of the substrate with reduced or no seam formation.

Career Highlights

SeongRyeong Kim is currently employed at ASM IP Holding B.V., where he continues to innovate in the semiconductor industry. His work has been instrumental in developing advanced techniques that improve the manufacturing processes of semiconductor devices.

Collaborations

SeongRyeong Kim collaborates with talented individuals in his field, including SeungHwan Lee and HakYong Kwon. These collaborations enhance the innovative potential of their projects and contribute to the advancement of semiconductor technology.

Conclusion

SeongRyeong Kim is a prominent figure in semiconductor innovation, with a focus on improving manufacturing techniques through his patented methods. His contributions are vital to the ongoing development of high-quality semiconductor devices.