Location History:
- Asan, KR (2007)
- Gwangju-si, KR (2008)
Company Filing History:
Years Active: 2007-2008
Title: Seong-Duk Cho: Innovator in Chemically Amplified Resists
Introduction
Seong-Duk Cho is a prominent inventor based in Gwangju-si, South Korea. He has made significant contributions to the field of polymer chemistry, particularly in the development of chemically amplified resist compositions. With a total of 2 patents to his name, his work has implications for various applications in the semiconductor industry.
Latest Patents
Cho's latest patents include a copolymer of alicyclic olefin having a secondary hydroxyl group and an acryl compound. This invention provides a polymer that exhibits excellent adhesion, storage stability, and dry etch resistance, while also maintaining good resolution in both critical dimensions and line/space patterns. Additionally, he has developed a chemically amplified resist composition that includes a novel polymer, a photoacid generator, and a solvent. This composition is designed to form resist patterns with high adhesiveness, low substrate dependency, and enhanced transparency at far ultraviolet wavelengths. The polymer's structure, which contains a maximum number of saturated aliphatic rings, improves etching resistance and addresses issues related to edge roughness in patterns.
Career Highlights
Seong-Duk Cho is currently employed at Korea Kumho Petrochemical Co., Ltd., where he continues to innovate in the field of polymer chemistry. His work has been instrumental in advancing the capabilities of chemically amplified resists, which are critical for modern semiconductor manufacturing processes.
Collaborations
Some of his notable coworkers include Young-Taek Lim and Joo-Hyeon Park, who have collaborated with him on various projects related to polymer development and resist technology.
Conclusion
Seong-Duk Cho's contributions to the field of chemically amplified resists highlight his role as an influential inventor in polymer chemistry. His innovative patents and ongoing work at Korea Kumho Petrochemical Co., Ltd. continue to shape advancements in semiconductor technology.