Sen-Nan Lee

Title: Innovations by Sen-Nan Lee in Semiconductor Technology

Introduction

Sen-Nan Lee is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on improving the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Sen-Nan Lee's latest patents is a method of planarization for semiconductor wafers. This innovative method involves forming an insulation layer over the wafer, followed by coating a spin-on-glass layer over the insulation layer. The spin-on-glass layer is then baked to smooth its upper surface, and a chemical-mechanical polishing process is carried out to achieve planarization. This method effectively eliminates recess cavities in the insulation layer's more loosely packed device region after the planarization process.

Another notable patent is an installation designed to improve chemical-mechanical polishing operations. This invention features a polishing table with concentric rings that rotate in the same direction, separated by small gaps. Each ring has a polishing pad mounted on top, and a delivery tube positioned above the pads delivers slurry through holes drilled in its surface. This design allows for a more uniform polishing of the wafer surface, enhancing the overall polishing results by utilizing materials with varying density, roughness, and chemical composition.

Career Highlights

Sen-Nan Lee is currently employed at Worldwide Semiconductor Manufacturing Corporation, where he continues to innovate in semiconductor manufacturing processes. His expertise and inventions have significantly impacted the industry, leading to advancements in wafer processing techniques.

Collaborations

Sen-Nan Lee has collaborated with notable coworkers, including Ying-Chih Liu and Wen-Yu Ho. Their combined efforts contribute to the ongoing development of cutting-edge technologies in the semiconductor field.

Conclusion

Sen-Nan Lee's contributions to semiconductor technology through his innovative patents demonstrate his commitment to advancing the industry. His work not only enhances manufacturing processes but also sets a foundation for future innovations in the field.