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Seiki Ishida

USPTO Granted Patents = 13 (Patent Applications = 1)

Average Co-Inventor Count = 2.0

ph-index = 7

Forward Citations = 108(Granted Patents)

Location History:

Kumamoto-Ken, JP (2003)
Kikuchi-gun, JP (2003)
Koshi-Machi, JP (2007)
Koshi, JP (2009 - 2019)
Kumamoto, JP (2013 - 2020)

Company Filing History:

13 out of 10,326

Tokyo Electron Limited

Years Active: 2003-2020

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13 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10553421 - Substrate processing apparatus, substrate processing method and storage medium (2020-02-04),

2. 10290518 - Substrate liquid processing apparatus (2019-05-14),

3. 9889476 - Substrate processing apparatus and substrate processing method (2018-02-13),

4. 9052610 - Coating and developing system and coating and developing method (2015-06-09),

5. 8443513 - Substrate processing apparatus (2013-05-21),

6. 8303232 - Substrate processing system (2012-11-06),

7. 8154106 - Coating and developing system and coating and developing method (2012-04-10),

8. 8033244 - Substrate processing system (2011-10-11),

9. 7809460 - Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored (2010-10-05),

10. 7563042 - Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus (2009-07-21),

11. 7284917 - Coating and developing system and coating and developing method (2007-10-23),

12. 6620245 - Liquid coating apparatus with temperature controlling manifold (2003-09-16),

13. 6579370 - Apparatus and method for coating treatment (2003-06-17),

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