The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Nov. 17, 2009
Seiki Ishida, Koshi, JP;
Seiki Ishida, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
There are disposed two second substrate transferring apparatusesand, which are configured to transfer substrates W between substrate processing unitsand a substrate accommodating part, in the up and down direction so as to correspond to the respective groups to which the plurality of substrate processing unitsare divided. In addition, there is disposed a substrate displacing apparatusthat is configured to displace a substrate W, which has been transferred by a first substrate transferring apparatusto the substrate accommodating partand is not yet processed by the wafer processing unit, to another position in the up and down direction in the substrate accommodating part, as well as displace a substrate W, which has been processed by the wafer processing unitand transferred by the second substrate transferring apparatusto the substrate accommodating part, to another position in the up and down direction in the substrate accommodating part