Menlo Park, CA, United States of America

Scott Briggs

USPTO Granted Patents = 4 

Average Co-Inventor Count = 3.9

ph-index = 2

Forward Citations = 48(Granted Patents)


Company Filing History:


Years Active: 2005-2024

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4 patents (USPTO):

Title: Scott Briggs: Innovator in Plasma Technology

Introduction

Scott Briggs is a notable inventor based in Menlo Park, California. He has made significant contributions to the field of plasma technology, holding a total of four patents. His work primarily focuses on systems and methods that enhance the efficiency of plasma chambers used in various industrial applications.

Latest Patents

Among his latest patents is a system for cleaning an edge ring pocket. This innovative method involves providing one or more process gases to a plasma chamber and supplying low frequency radio frequency power to an edge ring adjacent to a chuck in the chamber. This process increases the energy of plasma ions near the edge ring pocket, effectively removing residue during periods when a substrate is not being processed. Another significant patent involves a method for etching features in dielectric layers. This method utilizes a tungsten-containing etch gas that is formed into plasma, allowing for precise etching of features in a silicon oxide etch layer.

Career Highlights

Scott Briggs is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing plasma technology, contributing to the development of innovative solutions that enhance manufacturing processes.

Collaborations

Scott has collaborated with notable colleagues, including Eric A. Hudson and John Patrick Holland. Their combined expertise has fostered a collaborative environment that drives innovation within their projects.

Conclusion

Scott Briggs is a distinguished inventor whose work in plasma technology has led to significant advancements in the field. His contributions through patents and collaboration with industry professionals continue to shape the future of semiconductor manufacturing.

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