This inventor holds 43 USPTO granted patents and 5 published patent applications, primarily in Plasma Processing. Top assignees: Tokyo Electron Limited, Fuji Electric Co., Ltd., Tohoku University. Active years: 1995-2026.
Location History:
- Kanagawa-ken, JP (2000)
- Sagamihara, JP (1995 - 2003)
- Amagasaki, JP (2012)
- Sendai, JP (2013)
- Miyagi, JP (2016 - 2020)
- Yamanashi, JP (2022 - 2024)
- Nirasaki, JP (2024)
Company Filing History:
38 out of 10,883Â 
2 out of 4,826Â 
2 out of 1,051Â 
Years Active: 1995-2026
Areas of Expertise:
Title: Satoru Kawakami: A Pioneer in Plasma Processing Technologies
Introduction
Satoru Kawakami, a notable inventor based in Sagamihara, Japan, has made significant contributions to the field of plasma processing. With an impressive portfolio of 30 patents, his work focuses on improving substrate processing systems that are vital in various industrial applications.
Latest Patents
Among his latest innovations are two critical patents: a plasma processing apparatus and a plasma processing method. The plasma processing apparatus is designed for effectively cleaning the peripheral portion of a substrate using plasma. This apparatus features a depressurizable processing container that houses a substrate supported by a substrate support. Key components include a central electrode, upper and lower ring electrodes, and a configuration for adjusting the phase of the RF power supplied to these electrodes. This structure ensures efficient and effective processing of substrates.
Additionally, his substrate processing apparatus integrates a vacuum processing container with a unique rotation arm, which has a rotary axis at its center. This configuration not only enhances the processing capabilities but also optimizes the exhaust path within the vacuum processing environment.
Career Highlights
Satoru Kawakami has had a distinguished career, notably working with Tokyo Electron Limited, where he contributed his expertise to advance plasma processing technologies. His innovative spirit and engineering skills have allowed him to develop state-of-the-art processing systems that meet evolving industry demands.
Collaborations
Throughout his career, Kawakami has collaborated with esteemed colleagues, including Taro Ikeda and Nobuo Ishii. These collaborations have enriched his work and facilitated the development of groundbreaking technologies that are integral to the semiconductor and material processing industries.
Conclusion
Satoru Kawakami's contributions to plasma processing technology underscore his status as a leading inventor in the field. His 30 patents, particularly in the areas of plasma processing apparatus and methods, reflect a deep commitment to innovation and excellence. As industries increasingly rely on advanced processing techniques, Kawakami's work will continue to play a crucial role in shaping the future of substrate processing.