Tokyo, Japan

Satoko Nakagawa

USPTO Granted Patents = 2 

 

Average Co-Inventor Count = 2.0

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2017-2019

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2 patents (USPTO):Explore Patents

Title: Satoko Nakagawa: Innovator in Semiconductor Technology

Introduction

Satoko Nakagawa is a prominent inventor based in Tokyo, Japan. She has made significant contributions to the field of semiconductor technology, particularly in the measurement and calibration methods for silicon wafers. With a total of 2 patents, her work has advanced the understanding and application of carbon concentration measurement in silicon wafers.

Latest Patents

Her latest patents include a calibration curve determination method and a carbon concentration measurement method. These innovations allow for the measurement of carbon concentration using a minimal number of calibration curves, even in silicon wafers with high oxygen concentrations. The calibration curve determination method involves analyzing data sets that include irradiation dose, oxygen concentration, carbon concentration, and luminescence intensity. By selecting combinations of calibration curves that share the same irradiation dose but differ in oxygen concentration, she can obtain critical insights into the relationship between these variables.

Another notable patent is the semiconductor wafer manufacturing method, which focuses on forming calibration curves through ion implantation of impurities into samples. This method utilizes photoluminescence spectroscopy to measure the intensity of luminescence, thereby facilitating the creation of accurate calibration curves essential for semiconductor manufacturing.

Career Highlights

Satoko Nakagawa is currently employed at GlobalWafers Japan Co., Ltd., where she continues to innovate in the semiconductor industry. Her expertise in calibration methods and impurity concentration measurement has positioned her as a key player in her field.

Collaborations

She collaborates with notable colleagues such as Kazuhiko Kashima and Yuta Nagai, contributing to a dynamic research environment that fosters innovation and technological advancement.

Conclusion

Satoko Nakagawa's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as a leading inventor in the industry. Her work not only enhances the manufacturing processes but also paves the way for future innovations in the field.

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