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Sangjine Park

USPTO Granted Patents = 29 (Patent Applications = 38)

Average Co-Inventor Count = 4.7

ph-index = 4

Forward Citations = 35(Granted Patents)

Location History:

Yongin-si, KR (2014 - 2020)
Suwon-si, KR (2018 - 2024)

Company Filing History:

29 out of 131,611

Samsung Electronics Co., Ltd.

where one patent can have more than one assignee

Years Active: 2014-2025

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29 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12463061 - Wafer drying apparatus, wafer processing system including the same, and wafer processing method using the same (2025-11-04),

2. 12422754 - Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method (2025-09-23),

3. 12420316 - Substrate processing apparatus and substrate processing method (2025-09-23),

4. 12308255 - Apparatus and method for drying substrate (2025-05-20),

5. 12287147 - Wafer processing equipment and method of manufacturing semiconductor device (2025-04-29),

6. 12278133 - Substrate transferring unit, substrate processing apparatus, and substrate processing method (2025-04-14),

7. 12216408 - Apparatus for drying wafer and method for drying wafer (2025-02-04),

8. 12211716 - Substrate processing apparatus and substrate processing method (2025-01-28),

9. 12198923 - Substrate processing method and substrate processing system (2025-01-14),

10. 12057323 - Substrate processing method, micropattern forming method, and substrate processing apparatus (2024-08-06),

11. 11935772 - Apparatus for processing a substrate (2024-03-19),

12. 11881426 - Substrate transferring unit, substrate processing apparatus, and substrate processing method (2024-01-23),

13. 11640115 - Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method (2023-05-02),

14. 11527399 - Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same (2022-12-13),

15. 11424202 - Semiconductor devices having landing pads (2022-08-23),

Title: **Sangjine Park: Innovator in Substrate Processing Technologies**

Introduction:

Sangjine Park, based in Yongin-si, South Korea, is a renowned inventor with an impressive portfolio of 24 patents. His work primarily focuses on substrate processing technologies, which are vital in various industries, including semiconductor manufacturing and materials science.

Latest Patents:

Among his latest patents are innovative solutions such as a substrate transferring unit and a substrate processing apparatus. The substrate processing apparatus includes multiple process chambers designed for different operations: a developing process chamber, a drying process chamber that employs supercritical fluid, a bake operation chamber, and a cooling operation chamber. Additionally, his apparatus for drying wafers features a drying chamber with a supercritical fluid supply module, highlighting his expertise in efficient wafer drying methodologies.

Career Highlights:

Sangjine Park has had a significant career, making substantial contributions to major companies in the technology sector. He has worked at Samsung Electronics Co., Ltd. and Semes Co., Ltd., where he applied his innovative thinking to advance technologies in substrate processing.

Collaborations:

Throughout his career, Sangjine has collaborated with talented coworkers such as Boun Yoon and Jihoon Jeong. These collaborations have undoubtedly played a role in enhancing his innovative capabilities and the success of his advancements in substrate technology.

Conclusion:

Sangjine Park stands out as a leading inventor in the field of substrate processing technologies. With his numerous patents and collaborations with prominent companies and individuals, his contributions continue to shape the future of the industry.

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