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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12420316 B1

PDFFull Text
Date of Patent:
Sep. 23, 2025

Filed:

Oct. 13, 2023

Substrate processing apparatus and substrate processing method

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sangjine Park, Suwon-si, KR;

Jihwan Park, Suwon-si, KR;

Kuntack Lee, Suwon-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;

Attorney:

Muir Patent Law, PLLC

Primary Examiner:

Benjamin L Osterhout

Int. Cl.
CPC ...
B08B 7/00 (2006.01); B05B 1/18 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01); B05B 1/14 (2006.01); B05B 9/04 (2006.01); B05B 15/40 (2018.01); G03F 7/32 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0021 (2013.01); B05B 1/18 (2013.01); H01L 21/02101 (2013.01); H01L 21/67034 (2013.01); B05B 1/14 (2013.01); B05B 9/0423 (2013.01); B05B 15/40 (2018.02); G03F 7/325 (2013.01); G03F 7/427 (2013.01);
Abstract

A substrate processing apparatus including a processing container including a processing space, a substrate support extending in a first direction and a second direction perpendicular to the second direction, and configured to support a substrate in the processing container, a fluid supply device configured to supply a processing fluid in a supercritical state to the processing space through a container supply pipe, and a shower head assembly configured to diffuse the processing fluid supplied from the fluid supply device into the processing space. The shower head assembly includes a first shower head having a first diameter, and a second shower head arranged between the first shower head and the substrate and having a second diameter. The processing container is separated from the shower head assembly in a third direction perpendicular to the first direction and the second direction, such that a flow path is formed between the processing container and the shower head assembly.

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