Sanggil Bae

Title: Sanggil Bae: Innovator in Semiconductor Technology

Introduction

Sanggil Bae is a prominent inventor based in Clifton Park, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on improving overlay performance in semiconductor devices, which is crucial for the advancement of modern electronics.

Latest Patents

Among his latest patents is a structure and method to improve overlay performance in semiconductor devices. In this exemplary method, a first layer is formed on a substrate, and first overlay marks are created in a first zone of the first layer. A non-transparent layer is then formed on top of the first layer, with a portion of it removed from the area above the first zone to provide optical access to the first overlay marks. Subsequently, a second layer is formed on top of the non-transparent layer, where second overlay marks are created in a second zone. Position information is obtained from each of the first and second overlay marks, enhancing the accuracy of semiconductor manufacturing.

Another notable patent addresses overlay control with corrections for lens aberrations. This patent describes structures for detecting and correcting overlay inaccuracies, including an overlay target with a first plurality of features arranged along a first longitudinal axis in a specific line-space pattern. The second plurality of features is arranged along a second longitudinal axis, aligned substantially parallel to the first, but with a narrower line width.

Career Highlights

Sanggil Bae is currently employed at GlobalFoundries Inc., a leading semiconductor manufacturer. His expertise in overlay performance and correction methods has positioned him as a key player in the industry. His innovative approaches contribute to the ongoing evolution of semiconductor technology.

Collaborations

Throughout his career, Sanggil has collaborated with notable colleagues, including Ki Young Lee and Tony Joung. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Sanggil Bae's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in electronics and semiconductor manufacturing.