Sang-Yoon Woo

Title: Innovations by Sang-Yoon Woo

Introduction

Sang-Yoon Woo is a prominent inventor based in Gwangmyeong-si, South Korea. He has made significant contributions to the field of photoresist technology, particularly in the context of extreme ultraviolet (EUV) lithography. With a total of 5 patents to his name, his work has been instrumental in advancing semiconductor manufacturing processes.

Latest Patents

One of his latest patents is a photoresist composition for extreme ultraviolet and a method of forming a photoresist pattern using the same. The disclosed embodiments provide a photoresist composition that includes an out-of-band (OOB) absorbing material, which absorbs light of a wavelength between 100 nm to 300 nm. Another notable patent involves a method of forming patterns and manufacturing integrated circuit devices. This method utilizes an organic reflection-preventing film that includes a polymer with an acid-liable group. The process involves forming a photoresist film on the organic reflection-preventing film, exposing a selected area to generate an acid, and subsequently developing the photoresist film to create patterns.

Career Highlights

Sang-Yoon Woo is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and contribute to the field of semiconductor technology. His expertise in photoresist materials and methods has positioned him as a key figure in the industry.

Collaborations

He has collaborated with notable coworkers, including Hyun-woo Kim and Cheol-Hong Park, to further enhance the development of advanced technologies in their field.

Conclusion

Sang-Yoon Woo's contributions to photoresist technology and his innovative patents reflect his dedication to advancing semiconductor manufacturing. His work continues to influence the industry and pave the way for future innovations.