This inventor holds 2 USPTO granted patents. Top assignees: Moohan Co., Ltd., Samsung Electronics Co., Ltd.. Active years: 2006-2008.
Location History:
- Chuncheongbuk-do, KR (2006)
- Chungcheongbuk-do, KR (2008)
Company Filing History:
Years Active: 2006-2008
Title: Innovations of Sang Tae Sim in Semiconductor Manufacturing
Introduction
Sang Tae Sim is a notable inventor based in Chungcheongbuk-do, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on advanced methods and apparatuses that enhance the efficiency and effectiveness of semiconductor device production.
Latest Patents
Sang Tae Sim's latest patents include a "Method for manufacturing semiconductor device" and a "Method for atomic layer deposition (ALD) of silicon oxide film." The first patent discloses a plasma-enhanced atomic layer deposition (PEALD) apparatus designed for semiconductor device manufacturing. This apparatus features a housing with a reaction chamber, a rotary disk unit for wafer movement, and a gas spray unit for delivering reactive gases. Additionally, it includes a plasma generator to excite the second reactive gas, enhancing the deposition process.
The second patent relates to a method for forming silicon oxide films on substrates using an atomic layer deposition process. This innovative method allows for the formation of silicon oxide films at low temperatures and high deposition rates, utilizing a SiCl source. The atomic layer deposition apparatus can also be effectively cleaned in-situ at low temperatures using HF gas or a mixture of HF gas and gas containing hydroxyl groups.
Career Highlights
Sang Tae Sim has worked with prominent companies in the technology sector, including Samsung Electronics and Moohan Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Throughout his career, Sang Tae Sim has collaborated with notable colleagues such as Byoung Ha Cho and Cheol Ho Shin. These partnerships have likely fostered a creative environment that encourages the development of groundbreaking technologies in semiconductor manufacturing.
Conclusion
Sang Tae Sim's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in technology and manufacturing processes.