Sang Hun Oh

Title: Innovations by Inventor Sang Hun Oh

Introduction

Sang Hun Oh is a notable inventor based in Bucheon-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His work focuses on advanced methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of his latest patents is titled "Methods for forming a metal line in a semiconductor manufacturing process." This method involves a series of steps where a lower insulating layer, a lower metal line, and an upper insulating layer are sequentially stacked. A first photosensitive film is patterned on the upper insulating layer, which is then etched. After removing the photosensitive film, an etched portion of the upper insulating layer is filled with a nitride film. The upper insulating layer is subsequently removed, and a second photosensitive film is patterned before etching the lower metal line. Finally, an IMD layer is deposited, forming an air gap within it, which is then planarized. The nitride film is etched away to create a hole in the IMD layer, filled with a conductive material to form a contact plug, followed by the deposition of an upper metal line.

Another significant patent is the "Method for fabricating split gate flash memory device." This method includes depositing a second conductive layer to form a control gate on a semiconductor substrate that has a first conductive layer, an insulating layer, and an oxide layer. The process involves filling an anti-implant protective layer in a depression of the second conductive layer, performing ion implantation, and subsequently removing the protective layer. A photoresist pattern is formed by depositing a photoresist layer, which is treated with light exposure and development, leading to the etching of the second conductive layer to form the control gate.

Career Highlights

Sang Hun Oh has worked with prominent companies in the semiconductor industry, including Dongbu Electronics Co., Ltd. and Dongbu Anam Semiconductor, Inc. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

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Conclusion

Sang Hun Oh's contributions to semiconductor manufacturing through his innovative patents demonstrate his significant role in advancing technology in this field. His work continues to influence the development of efficient semiconductor devices.