The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Dec. 30, 2003
Applicant:
Sang Hun OH, Bucheon-si, KR;
Inventor:
Sang Hun Oh, Bucheon-si, KR;
Assignee:
DongbuAnam Semiconductor Inc., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for etching a metal layer on which an oxide-based ARC layer is coated in a semiconductor device comprises the step of performing a dry cleaning process by using a Cl/CHFbased gas, after dry cleaning the ARC layer by using the oxide-based gas. As a result, the etching rates of the center area and the edge area are substantially same.