This inventor holds 7 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2008-2010.
Company Filing History:
Years Active: 2008-2010
Title: Innovations by Sachin Deshpande
Introduction
Sachin Deshpande is a prominent inventor based in San Jose, CA, known for his contributions to the field of semiconductor processing. He holds a total of 7 patents, showcasing his innovative approach to technology and engineering.
Latest Patents
One of his latest patents is focused on real-time parameter tuning for etch processes. This invention provides a method of etch processing a wafer using a Real-Time Parameter Tuning (RTPT) procedure. The RTPT procedure can receive an input message that may include a pass-through message, a real-time feedforward message, or a real-time optimization message, or any combination thereof. The procedures utilize real-time wafer data to create, modify, and/or use etch recipe data, etch profile data, and/or etch model data. Additionally, RTPT procedures can leverage real-time wafer data to create, modify, and/or use process recipe data, process profile data, and/or process model data.
Another significant patent by Deshpande involves real-time parameter tuning using wafer thickness. This invention also employs a Real-Time Parameter Tuning (RTPT) procedure to process a wafer. It can receive an input message that includes various types of messages, similar to his previous patent. The RTPT procedures utilize real-time wafer thickness data to create, modify, and/or use measurement recipe data, measurement profile data, and/or measurement model data. Furthermore, these procedures can use real-time wafer thickness data to create, modify, and/or use process recipe data, process profile data, and/or process model data.
Career Highlights
Sachin Deshpande is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work focuses on enhancing etch processes, which are critical in the manufacturing of semiconductor devices.
Collaborations
He collaborates with notable coworkers, including Merritt Funk and Kevin Lally, who contribute to his innovative projects and research.
Conclusion
Sachin Deshpande's contributions to semiconductor processing through his patents demonstrate his expertise and commitment to innovation in the field. His work continues to influence the industry and pave the way for future advancements.