Company Filing History:
Years Active: 2000-2003
Title: Rodney C Ow - Innovator in Semiconductor Processing Technology
Introduction
Rodney C Ow is a notable inventor based in Cupertino, California. He has made significant contributions to the field of semiconductor processing technology. With a total of two patents to his name, Ow has demonstrated his expertise and innovative spirit in developing advanced systems for substrate handling.
Latest Patents
Ow's latest patents include an "Apparatus and method for using a robot to remove a substrate carrier door" and a "Wafer carrier adapter and method for use thereof." The first patent describes a substrate handling system that integrates a door removal assembly for an environmentally controlled substrate processing chamber. This system features a robot positioned within the chamber, equipped with a drive mechanism and a door interface mechanism. The drive mechanism allows for mechanical control of the door key control assembly, enabling the manipulation of a substrate carrier door to couple with a port door. This innovative design facilitates the storage of the coupled doors within the chamber or on the robot, enhancing the efficiency of substrate transport within the chamber.
The second patent, the "Wafer carrier adapter for use with a 200 millimeter wafer carrier," focuses on improving the alignment and support of wafer carriers in semiconductor processing environments. The adapter is designed to work with a pod door opener and features a support structure with recesses that correspond to a predetermined pattern of pins. This precise alignment ensures that the front opening of the 200 millimeter wafer carrier faces the port, optimizing the handling of silicon wafers.
Career Highlights
Rodney C Ow is currently employed at Pri Automation, Inc., where he continues to innovate in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of substrate handling systems. Ow's dedication to advancing technology in this field is evident through his patented inventions.
Collaborations
Ow collaborates with various professionals in his field, including his coworker Craig Chidlow. Their combined expertise contributes to the development of cutting-edge solutions in semiconductor processing.
Conclusion
Rodney C Ow is a distinguished inventor whose work in semiconductor processing technology has led to innovative patents that enhance substrate handling systems. His contributions continue to shape the future of the industry.
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