The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2003
Filed:
Mar. 02, 2000
Gregory Cook, Palo Alto, CA (US);
Craig Chidlow, Saratoga, CA (US);
Rodney Ow, Cupertino, CA (US);
Lang Van Nugyen, Mountain View, CA (US);
J. Rafael Gomez, Mountain View, CA (US);
Steve Reyling, Sunnyvale, CA (US);
Martin P. Aalund, Mountain View, CA (US);
Steven J. Remis, Sunnyvale, CA (US);
PRI Automation, Inc., Billerica, MA (US);
Abstract
A substrate handling system with integrated door removal assembly for an environmentally controlled substrate processing chamber is provided. The system includes a robot positioned within the chamber. A drive mechanism is connected to the robot. A door interface mechanism is attached to the drive mechanism and includes a door key and a door key control assembly. The drive mechanism provides mechanical control of the door key control assembly such that that door key is manipulated to couple a substrate carrier door to a port door. The coupled doors are storable within the chamber or on the robot. The drive mechanism may also include a substrate end effector, thereby allowing the robot to transport substrates within the chamber. The robot is movable within the chamber to multiple processing stations.