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Years Active: 2010-2025
Title: The Innovative Contributions of Robert Wieland
Introduction
Robert Wieland is a notable inventor based in Munich, Germany. He has made significant contributions to the field of micro-pump technology and semiconductor manufacturing. With a total of 3 patents to his name, Wieland's work showcases his expertise and innovative spirit.
Latest Patents
Wieland's latest patents include an electrostatic micro-pump and a process to produce an electrostatic micro-pump. The electrostatic micro-pump features a diaphragm arrangement that includes a diaphragm and a first electrode structure. Additionally, it incorporates a valve arrangement with an inlet check valve and an outlet check valve, which together partially enclose a pump chamber. The design also includes a second electrode structure that forms an electrostatic drive with the first electrode structure, allowing for diaphragm deflection. Furthermore, the micro-pump contains at least one anti-stiction bump positioned between the two electrode structures, which helps manage spacing variations in the pump chamber. His process for etching, chamber cleaning, and the associated gas mixtures is aimed at enhancing the efficiency of semiconductor manufacturing.
Career Highlights
Throughout his career, Robert Wieland has worked with prominent organizations such as Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. and Solvay S.A. His experience in these institutions has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.
Collaborations
Wieland has collaborated with notable colleagues, including Dieter Bollmann and Michael Pittroff. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Robert Wieland's contributions to the fields of micro-pump technology and semiconductor manufacturing highlight his innovative capabilities and dedication to advancing technology. His patents and collaborations reflect a commitment to excellence in engineering and invention.