This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2003-2005.
Company Filing History:
Years Active: 2003-2005
Title: Innovations by Robert T Borra in Semiconductor Wafer Manipulation
Introduction
Robert T Borra is an accomplished inventor based in Austin, TX (US). He has made significant contributions to the field of semiconductor technology, particularly in the manipulation of semiconductor wafers. With a total of 2 patents, his work has advanced the efficiency and effectiveness of wafer handling systems.
Latest Patents
Borra's latest patents focus on apparatus and methods for manipulating semiconductor wafers. One of his inventions includes a wafer handling system that features an end effector with a vacuum chuck, an internal vacuum plenum, and flow diverters. These flow diverters are strategically positioned within the vacuum plenum to define vacuum distribution channels that are in fluid communication with the vacuum ports of the vacuum chuck. This innovative design allows for the adjustment of vacuum pressure supplied to the vacuum ports, ensuring that as some ports are occluded by the wafer, the vacuum pressure is preferentially applied to unblocked ports. This mechanism increases the attractive force applied to unengaged portions of the wafer, which is particularly useful for securing thin semiconductor wafers that exhibit significant warpage.
Another patent by Borra also revolves around similar principles, emphasizing the importance of flow diverters in vacuum chucks. The invention includes a gas dispensing showerhead that can be positioned above the vacuum chuck to flatten the wafer, allowing for a secure engagement. This technology is crucial for enhancing the handling of delicate semiconductor wafers.
Career Highlights
Robert T Borra has established himself as a key figure in the semiconductor industry through his innovative patents. His work at Tokyo Electron Limited has positioned him at the forefront of wafer manipulation technology. His inventions have not only improved the handling of semiconductor wafers but have also contributed to the overall efficiency of semiconductor manufacturing processes.
Collaborations
Borra has collaborated with notable colleagues, including Michael James Lombardi and John McIntee. These partnerships have fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies in the semiconductor field.
Conclusion
Robert T Borra's contributions to semiconductor wafer manipulation through his patents have significantly impacted the industry. His innovative designs and collaborative efforts continue to advance the technology, ensuring more efficient and effective wafer handling systems.