This inventor holds 7 USPTO granted patents. Top assignee: Texas Instruments Corporation. Active years: 2004-2011.
Company Filing History:
Years Active: 2004-2011
Title: The Innovations of Robert Soper
Introduction
Robert Soper is a notable inventor based in Plano, TX (US), recognized for his contributions to the field of lithography. With a total of 7 patents to his name, Soper has made significant advancements in technology that enhance the precision of mask designs used in semiconductor manufacturing.
Latest Patents
One of Soper's latest patents is focused on a sub-resolution assist feature to improve symmetry for contact hole lithography. This innovative method involves creating a mask design that incorporates optical proximity correction features. The process begins with obtaining a target pattern that includes multiple target pattern features, which correspond to various features intended to be imaged on a substrate. Soper's method also entails generating a mask design that includes mask features corresponding to these imaged features. A key aspect of this invention is the control of the aspect ratio of at least one feature by positioning a sub-resolution assist feature near the corresponding mask feature, thereby enhancing the imaging process.
Career Highlights
Robert Soper has built a successful career at Texas Instruments Corporation, where he has been instrumental in developing cutting-edge technologies. His work has not only contributed to the company's reputation as a leader in the semiconductor industry but has also paved the way for future innovations in lithography techniques.
Collaborations
Throughout his career, Soper has collaborated with esteemed colleagues such as Theodore Warren Houston and Thomas J Aton. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Robert Soper's contributions to the field of lithography through his innovative patents and collaborative efforts highlight his importance as an inventor. His work continues to influence the semiconductor industry, ensuring advancements in technology for years to come.