Villach, Austria

Robert Muhr


Average Co-Inventor Count = 2.4

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2020-2022

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2 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Robert Muhr

Introduction

Robert Muhr is a notable inventor based in Villach, Austria. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his expertise and innovative spirit. His work primarily focuses on methods for inspecting semiconductor substrates and detecting adhesive residues.

Latest Patents

One of Robert Muhr's latest patents is titled "Detection of adhesive residue on a wafer." This method involves detecting adhesive residue on a wafer after peeling an adhesive film from it. The process includes illuminating the peeling tape with first UV light after peeling and acquiring a fluorescence image from the peeling tape. Additionally, it involves illuminating the wafer with second UV light after peeling and acquiring a fluorescence image from the wafer.

Another significant patent is the "Inspection method for semiconductor substrates using slope data and inspection apparatus." This method records first data from measuring points in an inspection area of a semiconductor substrate's main surface. The inspection area is designed around a center point of the main surface. The first data includes information about the slope of the main surface at the measuring points along a specific direction. A data processing apparatus analyzes this data to obtain position data of locations on the main surface that meet predetermined criteria.

Career Highlights

Robert Muhr is currently employed at Infineon Technologies AG, a leading company in semiconductor solutions. His role involves developing innovative inspection methods that enhance the quality and reliability of semiconductor products. His contributions have been instrumental in advancing the technology used in this critical industry.

Collaborations

Robert has collaborated with several talented individuals in his field, including Nicolas Siedl and Matthias Fehr. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Robert Muhr's work exemplifies the spirit of innovation in the semiconductor industry. His patents reflect a commitment to improving technology and ensuring the quality of semiconductor products. His contributions will undoubtedly continue to influence the field for years to come.

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