The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Dec. 07, 2018
Infineon Technologies Ag, Neubiberg, DE;
Robert Muhr, Villach, AT;
Nicolas Siedl, Villach, AT;
Infineon Technologies AG, Neubiberg, DE;
Abstract
An inspection method for semiconductor substrates using slope data and corresponding inspection apparatus are provided. The inspection method includes recording, by using an inspection apparatus, first data from measuring points in an inspection area of a main surface of a semiconductor substrate. The inspection area winds around a center point of the main surface. The first data includes information about a slope of the main surface at the measuring points along a first direction that deviates from a direction tangential to a circle that contains the measuring point and that has its center in the center point by not more than ±60°. A data processing apparatus analyzes the first data to obtain position data of locations on the main surface, at which the first data fulfills predetermined criteria. The position data is output through a data interface unit.