Glen Oaks, NY, United States of America

Robert M Gutowski


Average Co-Inventor Count = 3.0

ph-index = 2

Forward Citations = 29(Granted Patents)


Company Filing History:


Years Active: 2000-2003

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8 patents (USPTO):Explore Patents

Title: Innovations of Robert M Gutowski

Introduction

Robert M Gutowski is a notable inventor based in Glen Oaks, NY (US). He has made significant contributions to the field of semiconductor manufacturing, holding a total of 8 patents. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of photolithography processes.

Latest Patents

Among his latest patents is a system and method for providing a lithographic light source for a semiconductor manufacturing process. This innovative method includes producing a process fluid plume and generating a coaxial shielding fluid around it. Additionally, a plasma is created by providing an energy source that impinges on the process fluid plume. Another significant patent is for a fluid nozzle system and method in an emitted energy system for photolithography. This system may include a fluid nozzle with a nozzle cavity disposed within a nozzle body, which defines a nozzle passage extending from the downstream end into the nozzle cavity.

Career Highlights

Robert M Gutowski is currently employed at Advanced Energy Systems, Inc., where he continues to push the boundaries of technology in his field. His work has been instrumental in advancing semiconductor manufacturing processes, making them more efficient and reliable.

Collaborations

Throughout his career, Robert has collaborated with notable colleagues, including Edwin Gerard Haas and Vincent S Calia. These collaborations have contributed to the development of innovative solutions in the semiconductor industry.

Conclusion

Robert M Gutowski's contributions to the field of semiconductor manufacturing through his patents and collaborations highlight his role as a leading inventor. His work continues to influence advancements in photolithography and energy systems.

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