Advanced Energy Systems, Inc.

Robert M Gutowski

Edwin Gerard Haas

Vincent S Calia

Michael A Peacock

Alan M Todd

A method for providing a lithographic light source is provided that includes producing a process fluid plume. A coaxial shielding fluid is produced around the process fluid plume. A plasma is generated by providing an energy source that impinges on the process fluid plume.

System and method for providing a lithographic light source for a semiconductor manufacturing process

An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle ( ) may include a nozzle cavity ( ) disposed within a nozzle body ( ) between an up-stream end ( ) and a down-stream end ( ). A nozzle passage ( ) may be defined within the nozzle cavity ( ) and extend a longitudinal length ( ) from the down-stream end ( ) of the nozzle body ( ) into the nozzle cavity ( ). A discharge orifice ( ) may also be defined at the down-stream end ( ) of the nozzle cavity ( ) and have an associated width ( ). The width ( ) of the discharge orifice ( ) may be substantially less than the longitudinal length ( ) of the nozzle passage ( ).

Fluid nozzle system and method in an emitted energy system for photolithography

An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly ( ) may comprise a nozzle mounting system ( ) coupled to a housing assembly ( ) to secure a nozzle ( ). A diffuser mounting system ( ) may be coupled to the housing assembly ( ) to secure a diffuser ( ). An alignment system ( ) may operate to align the nozzle ( ) and the diffuser ( ) in a spatial relationship with each other to optimize operation of the diffuser ( ) in relation to the nozzle ( ).

Holder assembly system and method in an emitted energy system for photolithography

An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly (,) may comprise a nozzle mounting system (,) coupled to a housing assembly (,) to secure a nozzle (,). A diffuser mounting system (,) may be coupled to the housing assembly (,) to secure a diffuser (,). An alignment system (,) may operate to align the nozzle (,) and the diffuser (,) in a spatial relationship with each other to optimize operation of the diffuser (,) in relation to the nozzle (,).

A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.

Method and apparatus for producing extreme ultra-violet light for use in

An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle (22) may include a nozzle cavity (110) disposed within a nozzle body (100) between an up-stream end (102) and a down-stream end (104). A nozzle passage (118) may be defined within the nozzle cavity (110) and extend a longitudinal length (120) from the down-stream end (104) of the nozzle body (100) into the nozzle cavity (110). A discharge orifice (124) may also be defined at the down-stream end (104) of the nozzle cavity (110) and have an associated width (126). The width (126) of the discharge orifice (124) may be substantially less than the longitudinal length (120) of the nozzle passage (118).

Fluid nozzle system and method in an emitted energy system for

A method of fabricating very small diameter deep passages is provided. The method of fabricating very small diameter deep passages may include fabricating a recess (206) in a first side (202) of an article (200). An article passage (216) may be fabricated between a second side (204) of the article (200) and the recess (206). An insert (220) may be provided sized to fit the recess (206). An insert passage (230) may be fabricated in the insert (220). The insert (220) may then be secured in the recess (206), with the insert passage (230) and the article passage (216) aligned.

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Glen Oaks, NY, United States of America

Robert M Gutowski