The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2001
Filed:
Apr. 03, 1998
Edwin G. Haas, Sayville, NY (US);
Michael A. Peacock, Bay Shore, NY (US);
Robert M. Gutowski, Glen Oaks, NY (US);
Advanced Energy Systems, Inc., Bethpage, NY (US);
Abstract
An emitted energy system for use in photolithography may include a holder assembly operable to precisely align a diffuser and a nozzle. In accordance with one embodiment of the present invention, a holder assembly (,) may comprise a nozzle mounting system (,) coupled to a housing assembly (,) to secure a nozzle (,). A diffuser mounting system (,) may be coupled to the housing assembly (,) to secure a diffuser (,). An alignment system (,) may operate to align the nozzle (,) and the diffuser (,) in a spatial relationship with each other to optimize operation of the diffuser (,) in relation to the nozzle (,).