The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2002
Filed:
Jun. 20, 2000
Edwin G. Haas, Sayville, NY (US);
Robert M. Gutowski, Glen Oaks, NY (US);
Vincent S. Calia, Greenlawn, NY (US);
Advanced Energy Systems, Inc., Bethpage, NY (US);
Abstract
An emitted energy system for use in photolithography may include a fluid nozzle. A nozzle and its method of manufacture are provided. A nozzle ( ) may include a nozzle cavity ( ) disposed within a nozzle body ( ) between an up-stream end ( ) and a down-stream end ( ). A nozzle passage ( ) may be defined within the nozzle cavity ( ) and extend a longitudinal length ( ) from the down-stream end ( ) of the nozzle body ( ) into the nozzle cavity ( ). A discharge orifice ( ) may also be defined at the down-stream end ( ) of the nozzle cavity ( ) and have an associated width ( ). The width ( ) of the discharge orifice ( ) may be substantially less than the longitudinal length ( ) of the nozzle passage ( ).