Company Filing History:
Years Active: 2011-2018
Title: Innovations of Robert Eder in Microlithography
Introduction
Robert Eder is a notable inventor based in Karlsruhe, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative optical designs. With a total of five patents to his name, Eder's work has had a profound impact on the technology used in projection exposure apparatuses.
Latest Patents
One of Eder's latest patents is focused on a projection objective for a microlithographic projection exposure apparatus. This invention includes a plurality of optical elements arranged in multiple successive sections, which are separated by pupil planes or intermediate image planes. To correct wavefront deformation, at least two optical elements are designed with locally reprocessed aspherical surfaces. The arrangement of these optical elements is such that a first element is placed in one section and a second element in another, with the difference in their positions being an odd number.
Career Highlights
Eder is currently employed at Carl Zeiss SMT GmbH, a leading company in optical systems and technologies. His work at this esteemed organization has allowed him to collaborate with other experts in the field, enhancing the development of advanced optical solutions.
Collaborations
Eder has worked alongside his coworker, Norbert Wabra, contributing to various projects that push the boundaries of microlithographic technology. Their combined expertise has led to innovative advancements in optical design.
Conclusion
Robert Eder's contributions to microlithography through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of advanced optical systems.
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