Robert E Larson

Title: The Innovative Contributions of Robert E Larson

Introduction

Robert E Larson is a notable inventor based in Mound, MN (US). He has made significant contributions to the field of microelectronics, holding a total of five patents. His work focuses on advanced apparatuses and methods for treating microelectronic workpieces.

Latest Patents

Among his latest patents, Larson has developed an "Apparatus and method for scanning an object through a fluid stream." This invention describes an apparatus designed to treat the surface of a microelectronic workpiece through the impingement of fluid. The apparatus features a treatment chamber that defines an interior space for treating the workpiece, along with a movable chuck that supports the workpiece. Additionally, it includes a workpiece translational drive system that allows the chuck to move between a load position and processing positions, where the workpiece is treated using nozzles connected to a fluid supply. Another notable patent is the "Apparatus and method for scanning an object through a fluid spray," which shares similar features and functions, emphasizing the innovative approach Larson has taken in this field.

Career Highlights

Throughout his career, Robert E Larson has worked with various companies, including FSI International, Inc. His experience in the industry has allowed him to develop and refine his inventions, contributing to advancements in microelectronics.

Collaborations

Larson has collaborated with notable individuals such as David C Zimmerman and Sean D Simondet. These partnerships have likely enriched his work and led to further innovations in his field.

Conclusion

Robert E Larson's contributions to microelectronics through his patents and collaborations highlight his role as an influential inventor. His innovative apparatuses and methods continue to impact the industry positively.