The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Sep. 28, 2004
Robert E. Larson, Mound, MN (US);
Sean D. Simondet, Shakopee, MN (US);
David C. Zimmerman, Prior Lake, MN (US);
Todd K. Maciej, Little Falls, MN (US);
Quirin W. Matthys, St. Bonifacius, MN (US);
Robert E. Larson, Mound, MN (US);
Sean D. Simondet, Shakopee, MN (US);
David C. Zimmerman, Prior Lake, MN (US);
Todd K. Maciej, Little Falls, MN (US);
Quirin W. Matthys, St. Bonifacius, MN (US);
FSI International, Inc., Chaska, MN (US);
Abstract
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.