Company Filing History:
Years Active: 2012-2017
Title: Robbert W E Van De Kruijs: Innovator in Reflective Optical Elements
Introduction
Robbert W E Van De Kruijs is a notable inventor based in Nieuwegein, Netherlands. He has made significant contributions to the field of optical engineering, particularly in the development of reflective optical elements for extreme ultraviolet (EUV) lithography. With a total of two patents to his name, his work has had a considerable impact on the industry.
Latest Patents
Van De Kruijs's latest patents include a method for producing a reflective optical element for EUV lithography. This method addresses issues such as blistering, cracking, and chipping in the topmost layers of a multilayer system exposed to reactive hydrogen. The reflective optical element is designed to achieve maximum reflectivity at operating wavelengths ranging from 5 nm to 20 nm. The multilayer system consists of 30-60 stacks, each containing layers of high and low refractive index materials. Additionally, he has developed a reflective optical element that enhances maximum reflectivity at operating wavelengths in the extreme ultraviolet or soft x-ray wavelength range. This invention includes additional intermediate layers that improve reflectivity and prevent chemical interactions between layers.
Career Highlights
Throughout his career, Van De Kruijs has worked with prestigious companies such as Carl Zeiss GmbH and Carl Zeiss SMT GmbH. His experience in these organizations has allowed him to refine his expertise in optical technologies and contribute to groundbreaking innovations in the field.
Collaborations
Some of his notable coworkers include Andrey E Yakshin and Fred Bijkerk. Their collaboration has likely fostered an environment of innovation and creativity, leading to advancements in optical engineering.
Conclusion
Robbert W E Van De Kruijs is a distinguished inventor whose work in reflective optical elements has significantly advanced the field of EUV lithography. His patents reflect a deep understanding of optical materials and engineering principles, making him a key figure in this specialized area.
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