The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
Aug. 05, 2009
Andrey E. Yakshin, Nieuwegein, NL;
Robbert W. E. Van DE Kruijs, Nieuwegein, NL;
Fred Bijkerk, Bosch en Duin, NL;
Eric Louis, Ijsselstein, NL;
Ileana Nedelcu, Nieuwegein, NL;
Andrey E. Yakshin, Nieuwegein, NL;
Robbert W. E. Van De Kruijs, Nieuwegein, NL;
Fred Bijkerk, Bosch en Duin, NL;
Eric Louis, Ijsselstein, NL;
Ileana Nedelcu, Nieuwegein, NL;
Carl Zeiss GmbH, Oberkochen, DE;
Abstract
A reflective optical element exhibits an increase in the maximum reflectivity at operating wavelengths in the extreme ultraviolet or soft x-ray wavelength range. A first additional intermediate layer () and a second additional intermediate layer () are provided between the absorber layer () and the spacer layer (), wherein the first additional intermediate layer increases the reflectivity and the second additional intermediate layer () prevents chemical interaction between the first additional intermediate layer () and the adjoining spacer layer () and/or the absorber layer ().