Richard M Silver

Title: The Innovations of Richard M. Silver in Imaging Technology

Introduction

Richard M. Silver, a notable inventor based in Darwood, MD, has made significant contributions to the field of imaging technology. With two patents to his name, Silver's work focuses primarily on methods that enhance the precision of imaging critical dimensions through innovative techniques involving diffracted light.

Latest Patents

Silver's latest inventions include a groundbreaking technique dubbed "Zeroeth Order Imaging." This method allows for imaging critical dimensions by measuring the zeroeth order of diffracted light. The process involves directing light onto a target, causing it to diffract, and subsequently collecting and analyzing the zeroeth order of this diffracted light to ascertain the structural features of the target. This approach is particularly beneficial for articles of manufacture, including semiconductor devices, and it can be adapted to various targets fabricated on these articles.

Another significant patent of Silver's is the "Zero-order Overlay Targets," which consists of a first zero-order line array fabricated on a semiconductor structure's first layer, with its own specific pitch. This line array is complemented by a second zero-order line array on a second layer, which may differ in pitch and is optically coupled during overlay measurements. The design includes variable pitches to enhance measurement accuracy, with multiple sets of features contributing to this innovative approach.

Career Highlights

Throughout his career, Richard M. Silver has been associated with prominent organizations such as the National Institute of Standards and Technology and Sematech, Inc. His tenure at these institutions highlights his commitment to advancing technology in the semiconductor field.

Collaborations

Silver has collaborated with notable professionals in his field, including Pete Lipscomb and Bryan Barnes. These partnerships have played a crucial role in fostering innovative ideas and pushing the boundaries of imaging technology.

Conclusion

With a focus on precision and innovation, Richard M. Silver continues to make strides in the realm of imaging techniques through his patented inventions. His work not only reflects his expertise as an inventor but also contributes to the advancement of technology in critical fields such as semiconductor manufacturing.