The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 2010
Filed:
Oct. 29, 2007
Richard M. Silver, Darwood, MD (US);
Ravikiran Attota, Germantown, MD (US);
Robert Larrabee, Derwood, MD (US);
Richard M. Silver, Darwood, MD (US);
Ravikiran Attota, Germantown, MD (US);
Robert Larrabee, Derwood, MD (US);
The United States of America as represented by the Secretary of Commerce, Washington, DC (US);
The National Institute of Standards and Technology, Gaithersburg, MD (US);
Abstract
A method of imaging critical dimensions by measuring the zeroeth order of diffracted light. The method involves providing a target, directing light onto the target so as to cause the target to diffract the light. The zeroeth order of the diffracted light is collected and analyzed to determine structural features of the target. The target can be an article of manufacture, such as a semiconductor device, or a separate target that is provided or fabricated on an article of manufacture. One of at least the wavelength and the angle at which the light is directed onto the target can be scanned. The target can fill all or only a portion of the field of view.