The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Oct. 31, 2007
Richard Silver, Derwood, MD (US);
Pete Lipscomb, Cedar Park, TX (US);
Bryan Barnes, Derwood, MD (US);
Ravikirran Attota, Germantown, MD (US);
Richard Silver, Derwood, MD (US);
Pete Lipscomb, Cedar Park, TX (US);
Bryan Barnes, Derwood, MD (US);
Ravikirran Attota, Germantown, MD (US);
Sematech, Inc., Austin, TX (US);
National Institute of Standards and Technology, Gaithersburg, MD (US);
Abstract
A zero-order overlay target comprises a first zero-order line array fabricated on a first layer of a semiconductor structure, the first zero-order line array having a first pitch, and a second zero-order line array fabricated on a second layer of the semiconductor structure, the second zero-order line array having a second pitch. The second pitch may be different from the first pitch, and a portion of the second zero-order line array may be positioned to become optically coupled to a portion of the first zero-order line array when subject to an overlay measurement. Further, the second pitch may be variable. For example, the variable pitch may comprise a first set of features having a pitch approximately equal to the first pitch, a second set of features having a pitch different from the first pitch, and a third set of features having a pitch approximately equal to the first pitch.