Location History:
- Fremont, CA (US) (1998 - 2019)
- Dublin, CA (US) (2016 - 2019)
- Danville, CA (US) (2018 - 2021)
Company Filing History:
5 out of 3,768 
4 out of 993 
3 out of 13,684 
Years Active: 1998-2025
Title: Ramkishan Rao Lingampalli: Innovator in Semiconductor Processing Technologies
Introduction
Ramkishan Rao Lingampalli is a notable inventor based in Fremont, CA (US), recognized for his contributions to semiconductor processing technologies. He holds a total of 12 patents, showcasing his innovative spirit and technical expertise in the field.
Latest Patents
Among his latest patents, one significant invention is the lamellar ceramic structure. This invention includes a substrate support assembly comprising a monolithic ceramic body, a heater element, and an RF antenna, all integrated within the ceramic body. The design features a lamellar structure that enhances thermal conductivity, optimizing performance in various applications. Another notable patent is the apparatus including metallized-ceramic tubes for radio-frequency and gas delivery. This invention involves a semiconductor substrate processing apparatus that includes a vacuum chamber, a process gas source, and a substrate pedestal module made of ceramic material. The innovative use of metallized ceramic tubes allows for efficient gas delivery and RF power supply to the embedded electrode in the pedestal.
Career Highlights
Throughout his career, Ramkishan has worked with prominent companies in the semiconductor industry, including Lam Research Corporation and Novellus Systems Incorporated. His experience in these organizations has significantly contributed to his development as an inventor and innovator.
Collaborations
Ramkishan has collaborated with several talented individuals in his field, including Karl Frederick Leeser and Joel Philip Hollingsworth. These collaborations have likely fostered a creative environment that has led to the development of groundbreaking technologies.
Conclusion
Ramkishan Rao Lingampalli's contributions to semiconductor processing technologies through his innovative patents and collaborations highlight his significant impact on the industry. His work continues to influence advancements in the field, showcasing the importance of innovation in technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.